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Viewport Shutter - List of Manufacturers, Suppliers, Companies and Products

Viewport Shutter Product List

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Viewport Shutter "VPS Series"

Viewport Shutter "VPS Series"

The allowable baking temperature is 200℃! A viewport shutter that can protect from deposited materials.

The "VPS Series" is a shutter that can protect the viewport from deposition without affecting high vacuum. The shutter mechanism is a flapper type, and the allowable baking temperature is 200°C. We offer a lineup including the "VPS-070" with a mass of 0.8 kg, as well as the "VPS-114" and "VPS-152," which weigh 1.8 kg. 【Features】 ■ Protects the viewport from deposition without affecting high vacuum ■ Shutter mechanism: Flapper ■ Operating pressure range: Atmospheric pressure to 10^-8 Pa ■ Allowable baking temperature: Auto metal 200°C ■ Leak rate: Below 2×10^-11 Pa·m3/sec *For more details, please refer to the PDF document or feel free to contact us.

  • Other work tools
  • Other machine elements

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Viewport shutter

Viewport shutter

Slide-type UHV viewport shutter ensures ideal optical shielding and field of view when open, with no need for a drive space for the shutter plate, making installation of the device easy.

It is a sliding viewport shutter. Compared to the conventional rotary flapper-type shutter, it ensures an ideal optical shielding state and a good field of view when open. There is no need for a shutter plate drive space during device installation. Sizes range from CF70 to CF203, and custom specifications are also available.

  • Vacuum Equipment
  • Evaporation Equipment
  • Other semiconductor manufacturing equipment

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Viewport Shutter SF Series

Viewport Shutter SF Series

Viewport Shutter SF Series

Film deposition processes such as evaporation, sputtering, MBE, and CVD Prevent film deposition and damage to the viewport, which can be problematic in processes involving organic gases. 【Features】 ○ Usable with various ultra-high vacuum devices such as MBE equipment due to the conflat flange specification. ○ The rotary feedthrough uses the RFT series, which supports 200°C baking, allowing for high-temperature baking. ○ Compatible with φ70CF to φ203CF. ○ Can close with almost no gaps, effective for samples with high vapor pressure. ○ Optional shield glass and RHEED screen can be installed. ○ The opening and closing direction can be changed easily with simple reconfiguration. ○ Custom-sized flanges can also be manufactured. ● For other functions and details, please download the catalog.

  • Other machine elements

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Viewport shutter

Viewport shutter

Slide-type UHV viewport shutter ensures ideal optical shielding and field of view when open, with no need for a drive space for the shutter plate, making installation easy.

This is a sliding viewport shutter. Compared to the conventional rotary flapper-type shutter, it ensures an ideal optical shielding state and a good field of view when open. No drive space for the shutter plate is required during device installation. Sizes range from CF70 to CF203, and custom specifications are also available.

  • Vacuum Equipment
  • Evaporation Equipment
  • Electron microscope

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